Actinic detection and screening of multilayer defects on EUV mask blanks using dark-field imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5446, Issue PART 2, 2004, Pages 870-879

  Tezuka, Yoshihiro ^a   Ito, Masaaki ^a   Terasawa, Tsuneo ^a   Tomie, Toshihisa ^b  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Actinic inspection; EUV; Fractal; Mask blanks; Multilayer; Noise; Phase defect; Surface roughness

Indexed keywords

FRACTALS; IMAGING TECHNIQUES; LASER PRODUCED PLASMAS; OPTICAL MULTILAYERS; PHOTOLITHOGRAPHY; PROJECT MANAGEMENT; SIGNAL TO NOISE RATIO; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

ACTINIC INSPECTION; EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); MASK BLANKS; PHASE DEFECTS;

MASKS;

EID: 11844280377     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.557773     Document Type: Conference Paper

References (8)

1. Y. Tezuka, M. Ito, T. Terasawa and T. Tomie, "Actinic detection of multilayer defects on EUV mask blanks using LPP light source and dark-field imaging", Proceedings of SPIE, Vol. 5374, 2004.
2. E. M. Gullikson, C. Cerjan, D. G. Sterns, P. B. Mirkarimi and D. B. Sweeney, "Practical approach for modeling extreme ultraviolet lithography mask defects," J. Vac. Sci Technol. B, 20, p81, 2002.
3. E. M. Gullikson, E. Tejnil, T. Liang, and A. Stivers, "EUVL Defect Printability at the 32nm node," Proceedings of SPIE Vol.5374, 2004.
4. A. Stivers, T. Liang, M. Penn, B. Lieberman, G. Shelden, J. Folta, C. Larson, P. Mirkarim, C. Walton, E. Gullikson and M. Yi, "Evaluation of the Capability of a Multibeam Confocal Inspection System for Inspection of EUVL Mask Blanks", Proceedings of SPIE Vol. 4889, p408, 2002.
5. J. Urbach, J. Cavelaars, H. Kusunose, T. Liang and A. Stivers, "EUV substrate and blank inspection with confocal microscopy", Proceedings of SPIE Vol. 5276, p556, 2003.
6. C. Sambale, T. Schmoeller, A. Erdmann, P. Evanschitzky, "Rigorous simulation of defective EUV multilayer masks", Proceedings of SPIE Vol. 5256, p1239, 2003.
7. Y. Tezuka, M. Ito, T. Terasawa and T. Tomie, "Design and development of a novel actinic inspection tool for EUV multilayer-coated mask blanks", Proceedings of SPIE Vol. 5038, p866, 2003.
8. T. Kinoshita, T. Shoki, H. Kobayashi, R. Ohkubo, Y. Usui, M. Hosoya, N. Sakaya, O. Nagarekawa, "Fabrication of programmed phase defects on EUV multilayer blanks", Proceedings of SPIE Vol.5256, p595, 2003.