Influence of the Ar/O2 ratio on the growth and biaxial alignment of yttria stabilized zirconia layers during reactive unbalanced magnetron sputtering

Thin Solid Films

Volumn 484, Issue 1-2, 2005, Pages 18-25

  Mahieu, S ^a   Ghekiere, P ^a   De Winter, G ^a   Depla, D ^a   De Gryse, R ^a   Lebedev, O I ^b   Van Tendeloo, G ^b  

^a GHENT UNIVERSITY   (Belgium)

^b UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Electron microscopy; Faceting; Sputtering; Zirconia

Indexed keywords

ANISOTROPY; ARGON; DEPOSITION; ELECTRON MICROSCOPY; GROWTH KINETICS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; OXYGEN; PLASMAS; SPUTTERING; STAINLESS STEEL; YTTRIUM COMPOUNDS;

ADATOM MOBILITY; FACETING; GROWTH RATES; PLASMA COMPOSITION;

ZIRCONIA;

EID: 19844375516     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.01.021     Document Type: Article

References (21)

1. D. Dimos, P. Chaudhari, and J. Mannhart Phys. Rev., B 41-7 1990 4038
2. Y. Iijima, N. Tanabe, O. Kohno, and Y. Ikeno Physica, C 185-189 1991 1959
3. K. Hasegawa, K. Fujino, H. Mukai, M. Konishi, K. Hayashi, K. Sato, S. Honjo, K. Sato, H. Ishii, and Y. Iwata IEEE Trans. Appl. Supercond. 4 10-11 1996 487
4. J. Denul, G. De Winter, and R. De Gryse Physica, C 351 2001 45
5. S. Mahieu, G. De Winter, D. Depla, R. De Gryse, and J. Denul Surf. Coat. Technol. 187 2004 122
6. G. De Winter, J. Denul, and R. De Gryse IEEE Trans. Appl. Supercond. 11 1 2001 2893
7. I. Petrov, F. Adibi, J.E. Greene, W.D. Sproul, and W.D. Münz J. Vac. Sci. Technol., A 10 5 1992 3283
8. L. Hultman, G. Hâkansson, U. Wahlström, J.E. Sundgren, I. Petrov, F. Adibi, and J.E. Greene Thin Solid Films 250 2 1991 153
9. Powder Diffraction file, International Centre for Diffraction Data, pattern n° 00-030-1468.
10. H. Holzschuh, and H. Suhr Appl. Phys. Lett. 59 1991 470
11. J.A. Thornton J. Vac. Sci. Technol., A 4 6 1986 3059
12. P.B. Barna, and M. Adamik Thin Solid Films 317 1998 27
13. C.S. Shin, D. Gall, Y.W. Kim, N. Hellgren, I. Petrov, and J.E. Greene J. Appl. Phys. 92 9 2002 5084
14. Y. Kajikawa, S. Noda, and H. Komiyama J. Vac. Sci. Technol., A 21 6 2003 1943
15. T.Q. Li, S. Noda, and H. Komiyama J. Vac. Sci. Technol., A 21 5 2003 1717
16. P.J. Kelly, and R.D. Arnell Vacuum 56 2000 159
17. I. Petrov, P.B. Barna, L. Hultman, and J.E. Greene J. Vac. Sci. Technol., A 21 5 2003 S117
18. R. Snyders, R. Gouttebaron, J.P. Dauchot, and M. Hecq J. Anal. At. Spectrom. 18 2003 618
19. K. Wada, N. Yamaguchi, and H. Matsubara Surf. Coat. Technol. 184 2004 55
20. G. De Winter, S. Mahieu, I. De Roeck, R. De Gryse, and J. Denul IEEE Trans. Appl. Supercond. 13 2 2003 2567
21. N. Sonnenberg, A.S. Longo, M.J. Cima, B.P. Chang, K.G. Ressler, P.C. Mcintyre, and Y.P. Liu J. Appl. Phys. 74 2 1993 1027