Unbalanced magnetron sputter deposition of biaxially aligned yttria stabilized zirconia and indium tin oxide thin films

IEEE Transactions on Applied Superconductivity

Volumn 13, Issue 2 III, 2003, Pages 2567-2570

  De Winter, Griet ^a   Mahieu, Stijn ^a   De Roeck, Ilse ^a   De Gryse, Roger ^a   Denul, Jurgen ^b  

^a GHENT UNIVERSITY   (Belgium)

^b Bekaert sa   (Belgium)

Author keywords

Biaxially aligned buffer; Coated conductor; Indium tin oxide; Unbalanced magnetron sputtering; Yttria stabilized zirconia

Indexed keywords

INDIUM COMPOUNDS; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; THIN FILMS;

COATED CONDUCTORS;

YTTRIUM COMPOUNDS;

EID: 0042967787     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2003.811850     Document Type: Conference Paper

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