Microcrystalline silicon: An emerging material for stable thin-film transistors

Journal of the Society for Information Display

Volumn 12, Issue 1, 2004, Pages 3-9

  Roca i Cabarrocas, Pere ^a   Kasouit, Samir ^a,b   Kalache, Billel ^a   Vanderhaghen, Regis ^a   Bonnassieux, Yvan ^a   Elyaakoubi, Mustapha ^b   French, Ian ^c  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b Unaxis Displays Division France SAS   (France)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Growth studies; Microcrystalline silicon; Stable TFTs; Transport

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; CRYSTALLINE MATERIALS; DIELECTRIC AMPLIFIERS; GLOW DISCHARGES; LASER THEORY; NANOSTRUCTURED MATERIALS; NUCLEATION; THIN FILM TRANSISTORS; TRANSMISSION ELECTRON MICROSCOPY;

GROWTH STUDIES; MICROCRYSTALLINE SILICON; STABLE THIN-FILM TRANSISTORS (TFT);

AMORPHOUS SILICON;

EID: 1942521627     PISSN: 10710922     EISSN: None     Source Type: Journal    
DOI: 10.1889/1.1824232     Document Type: Conference Paper

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