A two-axis micromachined silicon actuator with micrometer range electrostatic actuation and picometer sensitive capacitive detection

Review of Scientific Instruments

Volumn 71, Issue 5, 2000, Pages 2211-2218

  Ayela, F ^a   Bret, J L ^a   Chaussy, J ^a   Fournier, T ^a   Menegaz E ^a,b  

^a LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^b SCHNEIDER ELECTRIC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001260768     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150608     Document Type: Article

References (11)

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