Numerical simulation for determining the mechanical properties of thin metal films using depth-sensing indentation technique

Thin Solid Films

Volumn 323, Issue 1-2, 1998, Pages 183-187

  Ma, Dejun ^a   Xu, Kewei ^a   He, Jiawen ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Finite element method; Mechanical properties; Metal films; Nanoindentation

Indexed keywords

COMPUTER SIMULATION; ELASTOPLASTICITY; FINITE ELEMENT METHOD; HARDENING; SEMICONDUCTING SILICON; STRAIN; THIN FILMS; YIELD STRESS;

NANOINDENTATION;

METALLIC FILMS;

EID: 0032098115     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01054-7     Document Type: Article

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