Design and test of new high Q microresonators fabricated by UV - LIGA

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 310-316

  Basrour, S ^a   Majjad, H ^a   Coudevylle, J R ^a   De Labachelerie, M ^a  

^a CNRS   (France)

Author keywords

FEM simulations; Microresonators; UV LIGA

Indexed keywords

ASPECT RATIO; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTRIC NETWORK ANALYZERS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; Q METERS;

MICRORESONATORS;

RESONATORS;

EID: 0034873374     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425337     Document Type: Conference Paper

References (11)