Electrochemical formation process of Si macropore and metal filling for high aspect ratio metal microstructure using single electrolyte system

Electrochemistry

Volumn 73, Issue 4, 2005, Pages 275-278

  Sato, Hirotaka ^a   Homma, Takayuki ^a   Mori, Kentaro ^a   Osaka, Tetsuya ^a   Shoji, Shuichi ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Electrochemical Nanofabrication; Electrodeposition; Microneedle Array; Silicon Anodization; Single batch Process

Indexed keywords

ANODIC OXIDATION; ARRAYS; ASPECT RATIO; ELECTROCHEMISTRY; ELECTRODEPOSITION; ELECTROLYTES; ETCHING; FILLING; MICROSTRUCTURE; NANOTECHNOLOGY; NICKEL;

ELECTROCHEMICAL NANOFABRICATION; MICRONEEDLE ARRAYS; SILICON ANODIZATION; SINGLE BATCH PROCESS;

POROUS SILICON;

EID: 18944378955     PISSN: 13443542     EISSN: None     Source Type: Journal    
DOI: 10.5796/electrochemistry.73.275     Document Type: Article

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