Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter

Journal of Electroanalytical Chemistry

Volumn 559, Issue , 2003, Pages 143-148

  Homma, Takayuki ^a   Sato, Hirotaka ^a   Kobayashi, Hideomi ^a   Arakawa, Takahiro ^a   Kudo, Hiroyuki ^a   Osaka, Testuya ^a   Shoji, Shuichi ^a   Ishisaki, Yoshitaka ^b   Oshima, Tai ^c   Iyomoto, Naoko ^c   Fujimoto, Ryuichi ^c   Mitsuda, Kazuhisa ^c  

^a WASEDA UNIVERSITY   (Japan)

^b TOKYO METROPOLITAN UNIVERSITY   (Japan)

^c JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

Electrodeposition; Microfabrication; Pattern formation; Surfactant; Three dimensional microstructure; X ray microcalorimeter

Indexed keywords

ELECTRODEPOSITION; MICROSTRUCTURE; PHOTOLITHOGRAPHY; POLYETHYLENE GLYCOLS; SURFACE ACTIVE AGENTS; X RAYS;

PATTERN FORMATION; X-RAY MICROCALORIMETER;

TIN;

EID: 0242405856     PISSN: 15726657     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0728(02)01282-2     Document Type: Conference Paper

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