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Physical Review B - Condensed Matter and Materials Physics

Volumn 68, Issue 16, 2003, Pages

Reactivity of halogens on a Si(111) surface studied by surface differential reflectivity

(4) Tanaka, M a Yamakawa, E a,b Shirao, T a,c Shudo, K a

a YOKOHAMA NATIONAL UNIVERSITY (Japan)

b Merrill Lynch Japan Secty Co Ltd (Japan)

c ULVAC PHI Inc (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BROMINE; BROMINE DERIVATIVE; CHLORIDE; CHLORINE; HALOGEN; SILICON;

ADSORPTION; ARTICLE; CHEMICAL BOND; CHEMICAL INTERACTION; CHEMICAL REACTION; CHEMICAL STRUCTURE; DESORPTION; ENERGY; KINETICS; PHOTON; PROBABILITY; REACTION ANALYSIS; ROOM TEMPERATURE; SPECTROSCOPY; STRUCTURE ANALYSIS; SURFACE DIFFERENTIAL REFLECTIVITY SPECTROSCOPY; SURFACE PROPERTY; TECHNIQUE; TEMPERATURE DEPENDENCE;

EID: 18744432766 PISSN: 10980121 EISSN: 1550235X Source Type: Journal
DOI: 10.1103/PhysRevB.68.165411 Document Type: Article

Times cited : (14)

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