Cantilevers with nano-heaters for thermomechanical storage application

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 397-404

  Drechsler, U ^a   Burer N ^a   Despont, M ^a   Durig U ^a   Gotsmann, B ^a   Robin, F ^b   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

Cantilever; MEMS; Mix and match lithography; Storage application; Thermomechanical probe

Indexed keywords

DATA STORAGE EQUIPMENT; FABRICATION; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; THERMOMECHANICAL TREATMENT;

NANOMETER-SIZED CANTILEVERS;

ARRAYS;

EID: 0038359094     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00095-9     Document Type: Conference Paper

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