Nanolithography of organic polysilane films using carbon nanotube tips

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 6 B, 2000, Pages 3744-3746

  Okazaki, Ai ^a   Akita, Seiji ^a   Nishijima, Hidehiro ^a   Nakayama, Yoshikazu ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

Carbon nanotube; Lithography; Polysilane; SPM tip

Indexed keywords

CARBON; CHEMICAL BONDS; COATED MATERIALS; GOGGLES; METALLIC FILMS; NANOTECHNOLOGY; NANOTUBES; POLYSILANES; SILICON;

SCANNING PROBE MICROSCOPY (SPM); VOLATILIZATION;

PLASTIC FILMS;

EID: 0034204829     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.3744     Document Type: Article

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