Nondestructive characterization of dislocations and micropipes in high-resistivity 6H-SiC wafers by deep-level photoluminescence mapping

Applied Physics Letters

Volumn 86, Issue 6, 2005, Pages 1-3

  Tajima, M ^a   Higashi, E ^a   Hayashi, T ^b   Kinoshita, H ^b   Shiomi, H ^b  

^a JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^b SiXON Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; DISLOCATIONS (CRYSTALS); GRAIN BOUNDARIES; MICROSTRUCTURE; PHOTOLUMINESCENCE; SILICON WAFERS;

DEEP-LEVEL PHOTOLUMINESCENCE; ETCH-PIT PATTERN; MICROPIPES; VACANCY-RELATED DEFECTS;

SILICON CARBIDE;

EID: 18744362531     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1862330     Document Type: Article

References (16)

1. H. McD. Hobgood, M. F. Brady, M. R. Calus, J. R. Jenny, R. T. Leonard, D. P. Malta, St. G. Muller, A. R. Powell, V. F. Tsvetkov, R. C. Glass, and C. H. Carter, Jr, Mater. Sci. Forum 457-460, 3 (2004).
2. J. Takahashi, M. Kanaya, and Y. Fujiwara, J. Cryst. Growth 135, 61 (1994).
3. G. A. Rozgonyi and M. A. Afromowitz, Appl. Phys. Lett. 19, 153 (1971).
4. H. J. Hovel and D. Guidotti, IEEE Trans. Electron Devices ED-32, 2331 (1985).
5. M. Tajima, Jpn. J. Appl. Phys., Part 2 27, L1323 (1988).
6. V. Higgs, E. C. Lightowlers, and P. Kightley, Mater. Res. Soc. Symp. Proc. 163, 57 (1990).
7. M. Tajima, H. Takeno, and T. Abe, Mater. Sci. Forum 83-87, 1327 (1992).
8. M. F. MacMillan, L. Hultman, C. Hallin, I. G. Ivanov, A. Henry, E. Janzen, and S. A. Galloway, Mater. Sci. Forum 264-268, 653 (1998).
9. M. Tajima, Y. Kumagaya, T. Nakata, M. Inoue, and A. Nakamura, Mater. Sci. Forum 264-268, 481 (1998).
10. J. M. Bluet, L. Masarotto, I. El Harrouni, and G. Guillot, Mater. Sci. Eng., B 102, 277 (2003).
11. M. Tajima, T. Nakane, T. Nakata, and M. Watanabe, Jpn. J. Appl. Phys., Part 2 38, L414 (1999).
12. M. Tajima, Z. Q. Li, and R. Shimidzu, Jpn. J. Appl. Phys., Part 2 41, L1505 (2002).
13. E. Sorman, N. T. Son, W. M. Chen, O. Kordina, C. Hallin, and E. Janzen, Phys. Rev. B 61, 2613 (2000).
14. N. T. Son, B. Magnusson, Z. Zolnai, A. Ellison, and E. Janźn, Mater. Sci. Forum 457-460, 437 (2004).
15. J. Schneider, H. D. Müller, K. Maier, W. Wilkening, and F. Fuchs, Appl. Phys. Lett. 56, 1184 (1990).
16. M. Katsuno, N. Ohtani, T. Aigo, T. Fujimoto, H. Tsuge, H. Yashiro, and M. Kanaya, J. Cryst. Growth 216, 256 (2000).