Multisensor chip for gas concentration monitoring in a flowing gas mixture

Sensors and Actuators, B: Chemical

Volumn 107, Issue 2, 2005, Pages 688-694

  Sabate N ^a   Gracia I ^a   Santander, J ^a   Cerda J ^b   Vila A ^b   Morante, J R ^b   Cane C ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Flowing gas; Micromachined gas sensors; Multisensor

Indexed keywords

ACOUSTIC WAVES; ARRAYS; MICROELECTRONIC PROCESSING; MICROMACHINING; SENSOR DATA FUSION; THICK FILM CIRCUITS;

FLOWING GAS; GAS MIXTURES; MICROMACHINED GAS SENSORS; MULTISENSORS;

CHEMICAL SENSORS;

EID: 18644372821     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.11.095     Document Type: Article

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