Integrated micromachined gas multisensor for domestic boilers

IECON Proceedings (Industrial Electronics Conference)

Volumn 4, Issue , 2002, Pages 2706-2711

  Cerda J ^a   Puigcorbe J ^a   Sabate N ^b   Berganzo, J ^c   Gracia I ^b   Cane C ^b   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c IK4 IKERLAN   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AIR POLLUTION CONTROL; BOILERS; CARBON MONOXIDE; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; DIELECTRIC FILMS; GAS EMISSIONS; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; NITROGEN OXIDES; SILICA; THIN FILMS;

GAS MULTISENSOR; POLYSILICON HEATER; POWER CONSUMPTION; SENSING MATERIALS; THERMAL INERTIA;

SENSOR DATA FUSION;

EID: 0036957887     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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