Low cost thermal flow sensor for home-appliances applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 549-555

  Sabate N ^a   Gracia I ^a   Cane C ^a   Berganzo, J ^b   Puicorbe J ^c   Morante, J R ^c  

^a CSIC   (Spain)

^b JKERLANC entrod e Investigaciones Tecnologicas   (Spain)

^c UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Flow gas sensor; Silicon micromachining; Thermal sensor

Indexed keywords

CHIP SCALE PACKAGES; COMPUTER SIMULATION; ELECTRIC APPLIANCES; FINITE ELEMENT METHOD; FLOW CONTROL; MICROMACHINING; RELIABILITY; SENSITIVITY ANALYSIS;

THERMAL FLOW SENSORS;

CHEMICAL SENSORS;

EID: 1642456779     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.462855     Document Type: Article

References (8)

1. Silicon thermal flow sensors
2. Thermal flow sensor for liquids and gases based on combination of two principles
3. A polysilicon flow sensor for gas flow meters
4. Fabrication and modelling of CMOS microbridge gas-flow sensors
5. A test structure for the design of thermal flow sensors
6. Influence of design geometry and packaging on the response of thermal CMOS flow sensors
7. Thermal mass flow meters
8. Thermal flow microsensors