Device transplant of optical MEMS for out of plane beam steering

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 325-328

  Nguyen, H ^a   Su, J G D ^a   Toshiyoshi, H ^a   Wu, M C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; RESONANCE; SCANNING; STEERING;

PLANE BEAM STEERING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035023071     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)