Computational study on carbide and nitride treatments of w-AlN(0001) substrate

Diamond and Related Materials

Volumn 13, Issue 3, 2004, Pages 425-432

  Zhang, Dongju ^a   Zhang, R Q ^a   Chan, W M ^a   Chan, K S ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Ab initio calculations; Aluminium nitride; Surface pretreatment

Indexed keywords

ADHESION; ALUMINUM; BINDING ENERGY; BONDING; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; NITRIDES; REACTION KINETICS; SUBSTRATES; SURFACE CHEMISTRY; ZINC COMPOUNDS;

BONDING CHARACTERISTICS; MOLECULAR ORBITAL CALCULATIONS; SUBSTRATE PRETREATMENT;

SURFACE REACTIONS;

DIAMOND;

EID: 1842734825     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.11.096     Document Type: Article

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