SCOPUS 정보 검색 플랫폼

Volumn 9, Issue 9, 2000, Pages 1774-1778

Different characteristics of boron and nitrogen atoms/ions on silicon (001) substrate and their effect on boron nitride growth

(4) Zhang, R Q a Chu, T S a Bello, I a Lee, S T a

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ADSORPTION; ATOMS; BOND STRENGTH (MATERIALS); IONS; MATHEMATICAL MODELS; POTENTIAL ENERGY; PROBABILITY DENSITY FUNCTION; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SUBSTRATES; SURFACES;

BORON NITRIDE; FIRST PRINCIPLE CALCULATION; FRONTIER ORBITAL THEORY; MOLECULAR ORBITAL THEORY;

BORON COMPOUNDS;

EID: 0034276485 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(00)00327-7 Document Type: Article

Times cited : (2)

References (26)

1
- 0025462188
- M. Mieo T. Yoshida Jpn. J. Appl. Phys. 29 1990 L1175
- (1990) Jpn. J. Appl. Phys. , vol.29 , pp. L1175
- Mieo, M.¹ Yoshida, T.²

2
- 36449000258
- S. Ulrich J. Scherer J. Schwan Appl. Phys. Lett. 68 1996 909
- (1996) Appl. Phys. Lett. , vol.68 , pp. 909
- Ulrich, S.¹ Scherer, J.² Schwan, J.³

3
- 21544450373
- N. Tanabe T. Hayashi M. Iwaki Diamond Relat. Mater. 1 1992 883
- (1992) Diamond Relat. Mater. , vol.1 , pp. 883
- Tanabe, N.¹ Hayashi, T.² Iwaki, M.³

4
- 36448999062
- D.J. Kester R. Messier J. Appl. Phys. 72 1992 504
- (1992) J. Appl. Phys. , vol.72 , pp. 504
- Kester, D.J.¹ Messier, R.²

5
- 0025701290
- M. Murakawa S. Watabnabe Surf. Coat. Technol. 43/44 1990 128
- (1990) Surf. Coat. Technol. , vol.43/44 , pp. 128
- Murakawa, M.¹ Watabnabe, S.²

6
- 0039236766
- Y. Andoh S. Nishiyama H. Kirimura T. Mikami K. Ogata F. Fujimoto Nucl. Instrum. Methods B 56/60 1991 276
- (1991) Nucl. Instrum. Methods B , vol.56/60 , pp. 276
- Andoh, Y.¹ Nishiyama, S.² Kirimura, H.³ Mikami, T.⁴ Ogata, K.⁵ Fujimoto, F.⁶

7
- 0028514659
- T.A. Friedmann P.B. Mirkarimi D.L. Medlin J. Appl. Phys. 76 1994 3088
- (1994) J. Appl. Phys. , vol.76 , pp. 3088
- Friedmann, T.A.¹ Mirkarimi, P.B.² Medlin, D.L.³

8
- 0027565782
- A. Weber U. Bringmann R. Nikuski C.P. Klaged Diamond Relat. Mater. 2 1993 201
- (1993) Diamond Relat. Mater. , vol.2 , pp. 201
- Weber, A.¹ Bringmann, U.² Nikuski, R.³ Klaged, C.P.⁴

9
- 0342603106
- D.J. Kester K.S. Ailey D.J. Lichtenwalner R.F. Davis J. Vac. Sci. Technol. A 12 1994 3047
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 3047
- Kester, D.J.¹ Ailey, K.S.² Lichtenwalner, D.J.³ Davis, R.F.⁴

10
- 0029243913
- H. Lüthje K. Bewilogua S. Daaud M. Johansson L. Hultman Thin Solid Films 257 1995 40
- (1995) Thin Solid Films , vol.257 , pp. 40
- Lüthje, H.¹ Bewilogua, K.² Daaud, S.³ Johansson, M.⁴ Hultman, L.⁵

11
- 0031248744
- W. Fukarek O. Kruse A. Kolitsch W. Möller Thin Solid Films 308/309 1997 38
- (1997) Thin Solid Films , vol.308/309 , pp. 38
- Fukarek, W.¹ Kruse, O.² Kolitsch, A.³ Möller, W.⁴

12
- 0040211840
- M.F. Plass W. Fukarek A. Kolitsch W. Möller Diamond Relat. Mater. 6 1997 594
- (1997) Diamond Relat. Mater. , vol.6 , pp. 594
- Plass, M.F.¹ Fukarek, W.² Kolitsch, A.³ Möller, W.⁴

13
- 0026239169
- L. Vel G. Demazeau J. Etourneau Mater. Sci. Eng. B 10 1991 149
- (1991) Mater. Sci. Eng. B , vol.10 , pp. 149
- Vel, L.¹ Demazeau, G.² Etourneau, J.³

14
- 0031364820
- A. Schütze K. Bewilogua H. Luthje S. Kouptsidis M. Gaertner Surf. Coat. Technol. 97 1997 33
- (1997) Surf. Coat. Technol. , vol.97 , pp. 33
- Schütze, A.¹ Bewilogua, K.² Luthje, H.³ Kouptsidis, S.⁴ Gaertner, M.⁵

15
- 0031365241
- R. Freudenstein S. Reinke W. Kulisch Surf. Coat. Technol. 97 1997 270
- (1997) Surf. Coat. Technol. , vol.97 , pp. 270
- Freudenstein, R.¹ Reinke, S.² Kulisch, W.³

16
- 0031547931
- Y. Setsuhara T. Suzuki Y. Tanaka Nucl. Instrum. Methods Phys. Res. B 127/128 1997 851
- (1997) Nucl. Instrum. Methods Phys. Res. B , vol.127/128 , pp. 851
- Setsuhara, Y.¹ Suzuki, T.² Tanaka, Y.³

17
- 21544477583
- D.R. McKenzie W.D. McFall W.G. Sainty C.A. Davis R.E. Collins Diamond Relat. Mater. 2 1993 970
- (1993) Diamond Relat. Mater. , vol.2 , pp. 970
- McKenzie, D.R.¹ McFall, W.D.² Sainty, W.G.³ Davis, C.A.⁴ Collins, R.E.⁵

18
- 0006258168
- R.Q. Zhang J.L. Andüjar E. Bertan Diamond Relat. Mater. 6 1997 589
- (1997) Diamond Relat. Mater. , vol.6 , pp. 589
- Zhang, R.Q.¹ Andüjar, J.L.² Bertan, E.³

19
- 85120138711
- J.K. Labanowski J.W. Andzelm Density Functional Methods in Chemistry 1991 Springer New York
- (1991)
- Labanowski, J.K.¹ Andzelm, J.W.²

20
- 0000189651
- A.D. Becke J. Chem. Phys. 98 1993 5648
- (1993) J. Chem. Phys. , vol.98 , pp. 5648
- Becke, A.D.¹

21
- 0345491105
- C. Lee W. Yang R.G. Parr Phys. Rev. B 37 1988 785
- (1988) Phys. Rev. B , vol.37 , pp. 785
- Lee, C.¹ Yang, W.² Parr, R.G.³

22
- 0032295783
- R.Q. Zhang E. Bertran S.-T. Lee Diamond Relat. Mater. 6 1998 1663
- (1998) Diamond Relat. Mater. , vol.6 , pp. 1663
- Zhang, R.Q.¹ Bertran, E.² Lee, S.-T.³

23
- 85120111346
- W.J. Hehre L. Radom P.v.R. Schleyer J.A. Pople ab initio Molecular Orbital Theory 1986 Wiley New York
- (1986)
- Hehre, W.J.¹ Radom, L.² Schleyer, P.v.R.³ Pople, J.A.⁴

24
- 85120100417
- M.J. Frisch G.W. Trucks H.B. Schlegel Gaussian 94, Revision E3 1995 Gaussian, Inc Pittsburgh, PA
- (1995)
- Frisch, M.J.¹ Trucks, G.W.² Schlegel, H.B.³

25
- 85120130492
- K. Fukui H. Fujimoto Frontier Orbitals and Reaction Paths: Selected Papers of Kenichi Fukui 1997 World Scientific Singapore
- (1997)
- Fukui, K.¹ Fujimoto, H.²

26
- 33749005863
- R. Hoffmann Rev. Mod. Phys. 60 1988 601
- (1988) Rev. Mod. Phys. , vol.60 , pp. 601
- Hoffmann, R.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.