Aluminum nitride buffer layer for diamond film growth

Journal of Materials Research

Volumn 11, Issue 7, 1996, Pages 1810-1818

  Godbole, V P ^a,b   Narayan, J ^a  

^a North Carolina State University   (United States)

^b UNIVERSITY OF PUNE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; FILM GROWTH; GRAPHITIZATION; HYDROGEN; NUCLEATION; PHASE TRANSITIONS; SILICON; STEEL;

ALUMINUM NITRIDE; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; SURFACE REACTIONS;

ALUMINUM COMPOUNDS;

EID: 0030194011     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0228     Document Type: Article

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