X-ray focusing by planar parabolic refractive lenses made of silicon

Optics Communications

Volumn 177, Issue 1, 2000, Pages 33-38

  Aristov, V V ^a   Grigoriev, M V ^a   Kuznetsov, S M ^a   Shabelnikov, L G ^a   Yunkin, V A ^a   Hoffmann, M ^b   Voges, E ^b  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b TU DORTMUND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; FOCUSING; LIGHT ABSORPTION; REFRACTIVE INDEX; SILICON WAFERS; X RAYS;

PLANAR PARABOLIC LENSES;

OPTICAL INSTRUMENT LENSES;

EID: 0033890853     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(00)00580-0     Document Type: Article

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