Determination of arsenic diffusion parameters by sulfur indiffusion in gallium arsenide

Journal of Applied Physics

Volumn 88, Issue 12, 2000, Pages 7045-7050

  Scholz, R F ^a   Werner, P ^a   Gosele U ^a   Engler, N ^b   Leipner, H S ^b  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1842495328     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1325383     Document Type: Article

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