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Volumn 68, Issue 1, 1999, Pages 19-24
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Dopant diffusion and segregation in semiconductor heterostructures: Part 2. B in GexSi1-x/Si structures
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Author keywords
[No Author keywords available]
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Indexed keywords
BORON;
CARRIER CONCENTRATION;
DIFFUSION IN SOLIDS;
FERMI LEVEL;
IONIZATION OF SOLIDS;
MATHEMATICAL MODELS;
SEMICONDUCTING GERMANIUM COMPOUNDS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DOPING;
SOLUBILITY;
GERMANIUM SILICIDE;
HETEROJUNCTIONS;
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EID: 0032785168
PISSN: 09478396
EISSN: None
Source Type: Journal
DOI: 10.1007/s003390050848 Document Type: Article |
Times cited : (21)
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References (15)
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