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Volumn 34, Issue 4, 2005, Pages 336-340

Thermally stimulated current spectroscopy of high-purity semi-insulating 4H-SiC substrates

Author keywords

High purity semi insulating (HPSI) 4H SiC substrates; Impurity and defect related traps; Thermally stimulated current (TSC) spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DATA ACQUISITION; DEEP LEVEL TRANSIENT SPECTROSCOPY; GALLIUM NITRIDE; POINT DEFECTS; SEMICONDUCTING ALUMINUM COMPOUNDS;

4H-SIC SUBSTRATES; HIGH-PURITY SEMI-INSULATING (HPSI); IMPURITY-AND DEFECT-RELATED TRAPS; THERMALLY STIMULATED CURRENT (TSC) SPECTROSCOPY;

SILICON CARBIDE;

EID: 18144402863 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-005-0106-5 Document Type: Conference Paper

Times cited : (32)

References (13)

1
- 0036575441
- Cree, Inc., Durham, NC
- J.R. Jenny, S.G. Muller, A. Powell, V.F. Tsvetkov, H.M. Hobgood, R.C. Glass, and C.H. Carter Jr., J. Electron. Mater. 31, 366 (2002); Cree, Inc., Durham, NC.
- (2002) J. Electron. Mater. , vol.31 , pp. 366
- Jenny, J.R.¹ Muller, S.G.² Powell, A.³ Tsvetkov, V.F.⁴ Hobgood, H.M.⁵ Glass, R.C.⁶ Carter Jr., C.H.⁷

2
- 0008859170
- Okmetic, AB, Linköpin, Sweden
- A. Ellison, B. Magnusson, C. Hemmingsson, W. Magnusson, T. Iakimov, L. Storastra, A. Henry, N. Henelius, and E. Janzén, Mater. Res. Soc. Symp. Proc. 640, H1.2.1 (2001); Okmetic, AB, Linköpin, Sweden.
- (2001) Mater. Res. Soc. Symp. Proc. , vol.640
- Ellison, A.¹ Magnusson, B.² Hemmingsson, C.³ Magnusson, W.⁴ Iakimov, T.⁵ Storastra, L.⁶ Henry, A.⁷ Henelius, N.⁸ Janzén, E.⁹

3
- 21544457867
- Z.-Q. Fang and D.C. Look, J. Appl. Phys. 69, 8177 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 8177
- Fang, Z.-Q.¹ Look, D.C.²

4
- 0005453981
- D.C. Look, Z.-Q. Fang, J.W. Hemsky, and P. Kengkan, Phys. Rev. B55, 2214 (1997).
- (1997) Phys. Rev. , vol.B55 , pp. 2214
- Look, D.C.¹ Fang, Z.-Q.² Hemsky, J.W.³ Kengkan, P.⁴

5
- 0032183651
- Z.-Q. Fang, D.C. Look, M. Uchida, K. Kainosho, and O. Oda, J. Electron. Mater. 27, L68 (1998).
- (1998) J. Electron. Mater. , vol.27
- Fang, Z.-Q.¹ Look, D.C.² Uchida, M.³ Kainosho, K.⁴ Oda, O.⁵

6
- 2942674773
- Z.-Q. Fang, D.C. Look, R. Armitage, Q. Yang, and E.R. Weber, Mater. Res. Soc. Symp. Proc. 798, 521 (2004).
- (2004) Mater. Res. Soc. Symp. Proc. , vol.798 , pp. 521
- Fang, Z.-Q.¹ Look, D.C.² Armitage, R.³ Yang, Q.⁴ Weber, E.R.⁵

7
- 0020996397
- D.C. Look, Semicond. Semimet. 19, 75 (1983).
- (1983) Semicond. Semimet. , vol.19 , pp. 75
- Look, D.C.¹

8
- 0000159451
- M. Pavlovic and U.V. Desnica, J. Appl. Phys. 84, 2018 (1998).
- (1998) J. Appl. Phys. , vol.84 , pp. 2018
- Pavlovic, M.¹ Desnica, U.V.²

9
- 0031188515
- T. Dalibor, G. Pensl, H. Matsunami, T. Kimoto, W.J. Choyke, A. Schöner, and N. Nordell, Phys. Status Solidi (a) 162, 199 (1997).
- (1997) Phys. Status Solidi (A) , vol.162 , pp. 199
- Dalibor, T.¹ Pensl, G.² Matsunami, H.³ Kimoto, T.⁴ Choyke, W.J.⁵ Schöner, A.⁶ Nordell, N.⁷

10
- 0033075954
- A.A. Lebedev, Semiconductors 33, 107 (1999).
- (1999) Semiconductors , vol.33 , pp. 107
- Lebedev, A.A.¹

11
- 0038302824
- J. Zhang, L. Storasta, J.P. Bergman, N.T. Son, and E. Janzén, J. Appl. Phys. 93, 4708 (2003).
- (2003) J. Appl. Phys. , vol.93 , pp. 4708
- Zhang, J.¹ Storasta, L.² Bergman, J.P.³ Son, N.T.⁴ Janzén, E.⁵

12
- 0002442611
- L. Storasta, F.H.C. Carlsson, S.G. Sridhara, J.P. Bergman, A. Henry, T. Egilsson, A. Hallen, and E. Janzén, Appl. Phys. Lett. 78, 46 (2001).
- (2001) Appl. Phys. Lett. , vol.78 , pp. 46
- Storasta, L.¹ Carlsson, F.H.C.² Sridhara, S.G.³ Bergman, J.P.⁴ Henry, A.⁵ Egilsson, T.⁶ Hallen, A.⁷ Janzén, E.⁸

13
- 0000598095
- T. Troffer, C. Habler, G. Pensl, K. Holzlein, H. Mitlehner, and J. Volki, Inst. Phys. Conf. Ser. 142, 281 (1996).
- (1996) Inst. Phys. Conf. Ser. , vol.142 , pp. 281
- Troffer, T.¹ Habler, C.² Pensl, G.³ Holzlein, K.⁴ Mitlehner, H.⁵ Volki, J.⁶

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