Strained silicon thin-film transistors fabricated on glass

Applied Physics Letters

Volumn 86, Issue 10, 2005, Pages 1-3

  Lee, J J ^a   Maa, J S ^a   Tweet, D J ^a   Hsu, S T ^a  

^a SHARP LABORATORIES OF AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORNING GLASS; SILICON SUBSTRATES; THERMAL OXIDATION;

ANNEALING; CHEMICAL VAPOR DEPOSITION; ELECTRON MOBILITY; GATES (TRANSISTOR); GLASS; MOS DEVICES; SEMICONDUCTING SILICON; STRAIN;

THIN FILM TRANSISTORS;

EID: 17944364576     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1880444     Document Type: Article

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