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Volumn 87, Issue 1-4, 2005, Pages 375-386

Structural, optical and electrical characterizations of μc-Si:H films deposited by PECVD

Author keywords

Microcrystalline silicon; Structural properties; Transport properties

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; ELECTRIC CONDUCTIVITY; OPTICAL PROPERTIES; SILANES; SILICON;

EID: 17744387177     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2004.07.026     Document Type: Conference Paper
Times cited : (15)

References (30)
  • 11
    • 6244273581 scopus 로고
    • Academic Press, New York, (Chapter 6)
    • J.S. Lannin, in: Semiconductors and Semimetals, vol. 21, Part B, Academic Press, New York, 1984, (Chapter 6)
    • (1984) Semiconductors and Semimetals , vol.21 , Issue.PART B
    • Lannin, J.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.