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Volumn 266-269 A, Issue , 2000, Pages 347-351
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The change of transport mechanism in μc-Si:H films induced by H2-diluted silane plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0005401190
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/s0022-3093(00)00045-4 Document Type: Article |
Times cited : (10)
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References (13)
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