Reversible effects in IR absorption peaks of SiC:H, measured as a function of the temperature

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 2, 2002, Pages 902-906

  Murri, Roberto ^a   Pinto, Nicola ^a   Ambrosone, Giuseppina ^b   Coscia, Ubaldo ^b   Musto, Pellegrino ^c  

^a UNIVERSITY OF CAMERINO   (Italy)

^b INFM   (Italy)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ANNEALING; CARBON; INFRARED RADIATION; MIXTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL CYCLING;

ABSORPTION PEAKS;

AMORPHOUS SILICON;

EID: 0036532143     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01117-6     Document Type: Article

References (17)