Design and process considerations for a tunneling tip accelerometer

Journal of Micromechanics and Microengineering

Volumn 6, Issue 3, 1996, Pages 352-358

  Zavracky, Paul M ^a   McClelland, Bob ^a   Warner, Keith ^a   Wang, Jianchao ^a   Hartley, Frank ^b   Dolgin, Ben ^b  

^a NORTHEASTERN UNIVERSITY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTRIC CONTACTS; ELECTRODES; ELECTRON DEVICE MANUFACTURE; MICROMACHINING;

ALLOY BONDING TECHNIQUE; SINGLE AXIS ACCELEROMETER;

ACCELEROMETERS;

EID: 0030230510     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/3/008     Document Type: Article

References (10)

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3. Braski A A, Albrecht T R and Quate CF 1988 Tunneling accelerometer J. Microscopy 152 100
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10. Zavracky P M, Hartley F, Sherman N, Hansen T and Warner K 1993 A new force balanced accelerometer using tunneling tip position sensing 7th Int. Conf. on Sensors and Actuators (Yokahama, Japan, 1993) pp 50-1