Suppression of hydrogen diffusion at the hydrogen-induced platelets in p -type Czochralski silicon

Applied Physics Letters

Volumn 86, Issue 13, 2005, Pages 1-3

  Huang, Y L ^a   Ma, Y ^a   Job, R ^a   Fahrner, W R ^a  

^a UNIVERSITY OF HAGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; DIFFUSION; HYDROGEN; HYDROGENATION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

HYDROGEN DIFFUSION; HYDROGEN-INDUCED PLATELETS (HIP); PLASMA EXPOSURE; VIBRATIONAL MODE (VM);

POLYSILICON;

EID: 17644398201     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1896443     Document Type: Article

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