Plasma immersion ion implantation of industrial gears

Surface and Coatings Technology

Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 260-264

  Zeng, Zhaoming ^a   Fu, Ricky K Y ^a   Tian, Xiubo ^a,b   Chu, Paul K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Gear; Implantation uniformity; Plasma immersion ion implantation

Indexed keywords

GEARS; IRON; PLASMA APPLICATIONS; PLASMA SHEATHS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE TREATMENT; WEAR RESISTANCE;

INDUSTRIAL GEARS; INDUSTRIAL MACHINES; ION DOSES; PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

PLASMA TREATMENT;

EID: 17644381594     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.02.048     Document Type: Article

References (26)

1. Conrad J.R Radtke J.L Dodd R.A Worzala F.J Tran N.C J. Appl. Phys. 62 1987 4591
2. Chen A Scheuer J.T Ritter C Alexander R.B Conrad J.R J. Appl. Phys. 70 1991 6757
3. Collins G.A Hutchings R Tendys J Samandi M Surf. Coat. Technol. 68 1994 285
4. A. Anders Handbook of Plasma Immersion Ion Implantation and Deposition, Wiley, New York
5. Zeng X.C Kwok T.K Liu A.G Chu P.K Tang B.Y Sheridan T.E IEEE Trans. Plasma Sci. 26 1998 175
6. Kwok T.K Zeng X.Z Chen Q.C Chu P.K Sheridan T.E IEEE Trans. Plasma Sci. 27 1999 225
7. Zeng Z.M Kwok T.K Tian X.B Tang B.Y Chu P.K Surf. Coat. Technol. 120 1999 663
8. Zeng Z.M Chu P.K Tian X.B Tang B.Y Kwok T.K IEEE Trans. Plasma Sci. 28 2000 394
9. W.J. Bartz Lubrication of Gearing, Mechanical Engineering Publication, London
10. A. Stokes Gear Handbook, Butterworth-Heinemann, Oxford
11. Zeng Z.M Zhang T Tang B.Y Tian X.B Chu P.K Surf. Coat. Technol. 115 1999 234
12. Tian X.B Zeng Z.M Tang B.Y Fu K.Y Kwok D.T.K Chu P.K Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 282 2000 164
13. Sheridan T.E Alport M.J Appl. Phys. Lett. 64 1994 1783
14. Hong M Emmert G.A J. Vac. Sci. Technol., B 12 2 1994 889
15. Kwok T.K Fu K.Y Chu P.K Surf. Coat. Technol. 156 2002 97
16. Malik S.M Muller D.E Sridharan K Fetherston R.P Tran N J. Appl. Phys. 77 1995 1015
17. Sheridan T.E J. Phys., D, Appl. Phys. 28 1995 1094
18. Keller G Paulus M Mandl S Stritzker B Rauschenbach B Nucl. Instrum. Methods, B 148 1999 64
19. Hartmann J Ensinger W Thomae R.W Bender H Koniger A Stritzker B Rauschenbach B Nucl. Instrum. Methods, B 112 1996 255
20. Hochbauer T Ensinger W Schrag G Hartmann J Stritzker B Rauschenbach B Nucl. Instrum. Methods, B 127/128 1997 869
21. Mandl S Reuther H Brutscher J Gunzel R Moller W Surf. Coat. Technol. 93 1997 229
22. Ensinger W Volz K Hochauer T Surf. Coat. Technol. 120-121 1999 347
23. Ensinger W Volz K Nucl. Instrum. Methods, B 166 2000 528
24. Chu P.K Tang B.Y Cheng Y.C Ko P.K Rev. Sci. Instrum. 68 4 1997 1866
25. Tian X.B Zhang T Zeng Z.M Tang B.Y Chu P.K J. Vac. Sci. Technol., A, Vac. Surf. Films 17 1999 3255
26. Zeng Z.M Tang B.Y Chu P.K Tian X.B Wang S.Y Wang X.F J. Vac. Sci. Technol., B 17 1999 851