Measured and calculated dose distribution for 2D plasma immersion ion implantation

Surface and Coatings Technology

Volumn 93, Issue 2-3, 1997, Pages 229-233

  Mandl S ^a   Reuther, H ^a   Brutscher, J ^a   Gunzel R ^a   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

AES; Computer simulation; Plasma immersion ion implantation; Plasma sheath

Indexed keywords

ALUMINUM FOIL; AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; DOSIMETRY; NITROGEN; PLASMA SHEATHS;

PLASMA IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

EID: 0042723967     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00050-9     Document Type: Article

References (18)

1. J. Conrad, J.L. Radtke, R.A. Dodd, F.J. Worzala, N.C. Tran, J. Appl. Phys. 62 (1987) 4591.
2. N.W. Cheung, W. En, E.C. Jones, C. Yu, Mater. Res. Soc. Symp. Proc. 279 (1993) 297.
3. S. Qin, J.D. Bernstein, Z. Zhao, C. Chan, J. Shao, S. Denholm, Nucl. Instrum. Methods B106 (1995) 636.
4. M. Samandi, B.A. Shedden, O.I. Smith, G.A. Collins, R. Hutchings, J. Tendys, Surf. Coat. Technol. 59 (1993) 261.
5. R. Günzel, J. Brutscher, S. Mändl, W. Möller, in Protective Coatings and Thin Films, eds. Y. Paleau and P.B. Barna (Kluwer, Dordecht, 1997), p. 307.
6. J.R. Conrad, S. Baumann, R. Fleming, G.P. Meeker, J. Appl. Phys. 65 (1989) 1707.
7. J. Hartmann, W. Ensinger, R.W. Thomae, H. Bender, A. Königer, B. Stritzker, B. Rauschenbach, Nucl. Instrum. Methods B112 (1996) 255.
8. M.W. Kissick, M.P. Hong, M.M. Shamin, J.D. Callen, J.R. Conrad, G.A. Emmert, J. Appl. Phys. 76 (1994) 7616.
9. T.E. Sheridan, Appl. Phys. Lett. 68 (1996) 1918.
10. J. Brutscher, Rev. Sci. Instrum. 67 (1996) 2621.
11. S. Mändl, J. Brutscher, R. Günzel, W. Möller, J. Vac. Sci. Technol. B 14 (1996) 2701.
12. C.D. Child, Phys. Rev. 32 (1911) 492.
13. W. En, N.W. Cheung, J. Vac. Sci. Technol. B 12 (1994) 833.
14. I. Langmuir, K.B. Blodgett, Phys. Rev. 22 (1923) 347.
15. K.-U. Riemann, J. Phys. D: Appl. Phys. 24 (1991) 493.
16. S. Mändl, R. Günzel, W. Möller, J. Phys. D: Appl. Phys. (to be published).
17. Los Alamos Accelerator Code Group, The Poisson/Superfish group of codes, LA-UR-96-1834, LANL, 1996.
18. J. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon, New York, 1985.