Three-dimensional dose uniformity of plasma immersion ion implantation shown with the example of macro-trenches

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 347-352

  Ensinger, W ^a   Volz, K ^a   Hochbauer T ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

Author keywords

Dose uniformity; Macro trenches; Plasma immersion ion implantation

Indexed keywords

COATING; ION IMPLANTATION; MEASUREMENT METHOD; PLASMA TREATMENT;

EID: 0033504661     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00462-4     Document Type: Conference Paper

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