Process window and mechanism of surface property enhancement of 9Cr18 steel using plasma immersion ion implantation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 851-854

  Zeng, Z M ^a   Tang, B Y ^a   Chu, P K ^a   Tian, X B ^a   Wang, S Y ^a   Wang, X F ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644450513     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590666     Document Type: Article

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