Effects of tube length and radius for inner surface plasma immersion ion implantation using an auxiliary electrode

IEEE Transactions on Plasma Science

Volumn 27, Issue 1, 1999, Pages 225-238

  Kwok, Dixon Tat Kun ^b   Zeng, Xuchu ^a,b   Chen, Qingchuan ^b   Chu, Paul K ^a,b   Sheridan, Terrence E ^c  

^a IEEE   (Hong Kong)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

INNER SURFACE; PARTICLE IN CELL; PLASMA IMMERSION ION IMPLANTATION; TUBE LENGTH;

COMPUTER SIMULATION; ELECTRODES; ION IMPLANTATION; ONE DIMENSIONAL; PERMITTIVITY; SURFACES; TWO DIMENSIONAL; VELOCITY;

PLASMA APPLICATIONS;

EID: 0032624108     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.763123     Document Type: Article

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