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Volumn 156, Issue 1-3, 2002, Pages 97-102

Two-dimensional particle-in-cell plasma immersion ion implantation simulation of gear/windmill geometry in cylindrical co-ordinates along the (r-θ) plane

(3) Kwok, D T K a Fu, R K Y a Chu, P K a

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Ion implantation; Numerical simulation; Particle in cell simulation; Plasma processing and deposition

Indexed keywords

GEAR TEETH; GEOMETRY; PLASMA APPLICATIONS;

PLASMA IMMERSION;

ION IMPLANTATION;

EID: 0036641919 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00130-5 Document Type: Article

Times cited : (18)

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