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Volumn 144-147, Issue , 2005, Pages 405-408

Determination of the source of two extra components in Si 2p photoelectron spectra of the SiO2/Si(1 0 0 ) interface

Author keywords

Interface; Photoelectron; Ultrathin silicon oxide

Indexed keywords

CURVE FITTING; ELECTROMAGNETIC WAVE DIFFRACTION; MATHEMATICAL MODELS; OXIDATION; PHOTOELECTRON SPECTROSCOPY; SILICA; SILICON; ULTRATHIN FILMS;

EID: 17544371723     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2005.01.120     Document Type: Conference Paper
Times cited : (23)

References (14)
  • 1
    • 2942596934 scopus 로고    scopus 로고
    • Fundamental aspects of silicon oxidation
    • Springer-Verlag, Berlin Heidelberg
    • Y.J. Chabal (Ed.), Fundamental Aspects of Silicon Oxidation, Springer Series in Materials Science, vol. 46, Springer-Verlag, Berlin Heidelberg, 2001
    • (2001) Springer Series in Materials Science , vol.46
    • Chabal, Y.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.