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Volumn 54, Issue 5, 2005, Pages 772-779
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Properties of nanoporous organosilicate hybrid thin films with a bimodal pore size distribution
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Author keywords
Cyclodextrin; Cyclosiloxane; Dielectric properties; Mechanical properties; Nanopore; Polysilsesquioxane
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Indexed keywords
COMPOSITION;
DIELECTRIC MATERIALS;
NANOSTRUCTURED MATERIALS;
NUCLEAR MAGNETIC RESONANCE;
PERMITTIVITY;
POROUS MATERIALS;
THIN FILMS;
CYCLODEXTRIN;
HYBRID THIN FILMS;
ORGANOSILICATES;
POROGENS;
SILICATES;
POLYMER SCIENCE;
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EID: 17344368792
PISSN: 09598103
EISSN: None
Source Type: Journal
DOI: 10.1002/pi.1754 Document Type: Article |
Times cited : (3)
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References (17)
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