300 mm factory layout and automated materials handling

Solid State Technology

Volumn 42, Issue 12, 1999, Pages

  Wright, Robert ^a   Cunningham, Carl ^a   Benhayoune, Kamal ^a   Campbell, Elizabeth ^a   Swaminathan, Venkat ^a   White, Rick ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER INTEGRATED MANUFACTURING; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTRIC MANUFACTURING PLANTS; INTEGRATED CIRCUIT MANUFACTURE; MATHEMATICAL MODELS; SILICON WAFERS; STRUCTURAL ANALYSIS;

SOFTWARE PACKAGE AUTOSCHED;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033313626     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)