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Volumn , Issue , 1996, Pages 1008-1013
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Simulation in the design of ground-based intrabay automation systems
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CONTROL SYSTEMS;
DESIGN;
MATERIALS HANDLING;
SEMICONDUCTOR DEVICE MANUFACTURE;
SIMULATION;
AUTOMATION SYSTEMS;
MATERIAL TRANSPORT;
SEMICONDUCTOR FACTORY;
PRODUCTION ENGINEERING;
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EID: 0030421922
PISSN: 02750708
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1145/256562.256887 Document Type: Conference Paper |
Times cited : (10)
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References (3)
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