Influence of the power on the processes controlling the formation of ECR-CVD carbon nitride films from CH4/Ar/N2 plasmas

Plasma Sources Science and Technology

Volumn 13, Issue 1, 2004, Pages 121-126

  Camero, M ^a   Gordillo Vazquez F J ^b   Ortiz, J ^a   Gomez Aleixandre C ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b INSTITUTO DE ÓPTICA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL EMISSION SPECTROSCOPY (OES); PENNING MECHANISM;

ARGON; CARBON NITRIDE; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; HYDROGENATION; LIGHT EMISSION; MASS SPECTROMETRY; METHANE; NITROGEN; SILICON; X RAY SPECTROSCOPY;

PLASMAS;

EID: 1642396733     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/1/015     Document Type: Article

References (18)

1. Liu A Y and Cohen M L 1989 Science 245 841
2. Muhl S and Méndez J M 1999 Diamond Relat. Mater. 8 1809
3. Yoon S F, Rusli J A, Zhang Q, Yang C Y, Yang H and Watt F 1999 Thin Solid Films 340 62
4. Hancock G 1995 Surf. Coat. Technol. 74-75 10
5. Clay K J, Speakman S P, Amaratunga G A J and Silva S R P 1996 J. Appl. Phys. 79 7227
6. Camero M, Gómez-Aleixandre C and Albella J M 2003 Proc. Chemical Vapor Deposition XVI and EuroCVD14 p 1351
7. Vaudo R P, Cook J W Jr and Schetzina J F 1994 J. Vac. Sci. Technol. B 12 1232
8. Wu J J, Chen K H, Wen C Y, Chen L C, Guo X J, Lo H J, Lin S T, Yu Y C, Wang C W and Lin E K 2000 Diamond Relat. Mater. 9 556
9. Lee W, Lin J, Lee C, Cheng H and Yew T 2001 Diamond Relat. Mater. 10 2075
10. Zhu W, Inspektor A, Badzian A R, McKenna T and Messier R 1990 J. Appl. Phys. 68 1489
11. Gicquel A, Chenevier M, Hassouni Kh, Tserepi A and Dubus M 1998 J. Appl. Phys. 83 7504
12. Francis A, Crametchi U, Dobele H F and Sadeghi N 1999 Int. Conf. on Phenom. Ionized Gases (ICPIG'99) (contributed papers) vol 4, p 43
13. Camero M, Gago R, Gómez-Aleixandre C and Albella J M 2003 Diamond Relat. Mater. 12 632
14. Hong J, Granier A, Goullet A and Turban G 2000 Diamond Relat. Mater. 9 573
15. Godet C, Conway N M J, Bourée J E, Bouamra K, Grosman A and Ortega C 2002 J. Appl. Phys. 91 4154
16. Bhattacharyya S, Granier A and Turban G 1999 J. Appl. Phys. 86 4668
17. Raizer Y P 1991 Gas Discharge Physics (Berlin: Springer)
18. Möller W 1991 Diamond and Diamond-Like Films and Coatings ed R E Clausing et al (New York: Plenum) p 229