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Volumn 95, Issue 5, 2004, Pages 2763-2769
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On the scaling of thermal stresses in passivated nanolnterconnects
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Author keywords
[No Author keywords available]
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Indexed keywords
MOORE'S LAW;
NANOINTERCONNECTS;
ELECTROMIGRATION;
FABRICATION;
FAILURE (MECHANICAL);
MATHEMATICAL MODELS;
MICROPROCESSOR CHIPS;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
THERMAL STRESS;
OPTICAL INTERCONNECTS;
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EID: 1642330685
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1632011 Document Type: Article |
Times cited : (10)
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References (34)
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