Analysis of average thermal stresses in passivated metal interconnects

Journal of Applied Physics

Volumn 86, Issue 11, 1999, Pages 6088-6095

  Wikstrom A ^a   Gudmundson, P ^a   Suresh, S ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3242854332     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371658     Document Type: Article

References (15)

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