Note on the thermal stresses in passivated metal interconnects

Applied Physics Letters

Volumn 79, Issue 11, 2001, Pages 1706-1708

  Sharma, P ^a   Ardebili, H ^a   Loman, J ^a  

^a GE GLOBAL RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035839963     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1404124     Document Type: Article

References (8)

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