Effect of TiOx on the formation of titanium suicide layer

Journal of Applied Physics

Volumn 93, Issue 12, 2003, Pages 9803-9811

  El Omari, H ^a   Boyeaux, J P ^b   Errkik, A ^a   Lemiti, M ^b   Laugier, A ^b  

^a HASSAN 1ST UNIVERSITY   (Morocco)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; HEAT TREATMENT; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); SECONDARY ION MASS SPECTROMETRY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CONTACT RESISTIVITY;

TITANIUM OXIDES;

EID: 0038482041     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1568534     Document Type: Article

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