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Volumn 135, Issue 1, 2000, Pages 1-7
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Structure/mechanical properties relationship of titanium-oxygen coatings reactively sputter-deposited
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Author keywords
[No Author keywords available]
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Indexed keywords
COALESCENCE;
COMPOSITION EFFECTS;
INTERFACES (MATERIALS);
MAGNETRON SPUTTERING;
RESIDUAL STRESSES;
SPUTTER DEPOSITION;
SUBSTRATES;
TITANIUM DIOXIDE;
VICKERS HARDNESS TESTING;
X RAY DIFFRACTION ANALYSIS;
REACTIVE SPUTTERING;
PROTECTIVE COATINGS;
HARDNESS;
MECHANICAL PROPERTY;
SPUTTERING;
STRESS;
TITANIUM;
TITANIUM DIOXIDE;
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EID: 0034351315
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(00)00721-0 Document Type: Article |
Times cited : (57)
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References (16)
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