Nitride microlens arrays for blue and ultraviolet wavelength applications

Applied Physics Letters

Volumn 82, Issue 21, 2003, Pages 3692-3694

  Oder, T N ^a   Shakya, J ^a   Lin, J Y ^a   Jiang, H X ^a  

^a KANSAS STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; GALLIUM NITRIDE; INDUCTIVELY COUPLED PLASMA; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

PHOTONIC DEVICES;

LENSES;

EID: 0038645889     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1579872     Document Type: Article

References (9)

1. M. B. Stern and T. R. Jay, Opt. Eng. (Bellingham) 33, 3547 (1994).
2. N. C. Craft and A. Y. Feldblum, Appl. Opt. 31, 1735 (1992).
3. O. Owada, J. Electrochem. Soc. 131, 2373 (1984).
4. H. X. Jiang, S. X. Jin, J. Li, J. Shakya, and J. Y. Lin, Appl. Phys. Lett. 78, 1303 (2001).
5. S. H. Park, H. Jeon, Y. J. Sung, and G. Y. Yeom, Appl. Opt, 40, 3698 (2001).
6. D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, in Microlens Arrays, IOP Short Meetings Series No. 30, edited by M. C. Hutley (Institute of Physics, Teddington, UK, 1991), p. 23.
7. Z. D. Popovic, R. A. Sprague, and G. A. N. Connell, Appl. Opt. 27, 1281 (1988).
8. J. F. Muth, J, D. Brown, M. A. L. Johnson, Z. Yu, R. M. Kolbas, J. W. Wood, Jr., and J, F. Schetzina, MRS Internet J. Nitride Semicond. Res. 4S1, G5.2 (1999).
9. Photonics Spectra (Laurin Publishing, Pittsfield, 2002), p. 22.