Imprint lithography of pyramidal photonic pillars using hydrazine etching

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 16, Issue 3-4, 2003, Pages 568-573

  Grigaliunas, V ^a   Tamulevicius, S ^a   Niaura, G ^b   Kopustinskas, V ^a   Gudonyte, A ^a   Jucius, D ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

Hydrazine etching; Imprint lithography; Photonic pillars

Indexed keywords

ETCHING; HYDRAZINE; INFRARED RADIATION; LASER PULSES; MASKS; NEODYMIUM LASERS;

PHOTONIC PILLARS;

LITHOGRAPHY;

EID: 0037370490     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(02)00648-3     Document Type: Conference Paper

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