Pyrotechnic actuator: a new generation of Si integrated actuator

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 211-215

  Rossi, Carole ^a   Estève, Daniel ^a   Mingués, Corinne ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; SEMICONDUCTING SILICON; SILICA; SILICON NITRIDE;

GAS PENETRATOR; MICRO VALVE; MICROTHRUSTER; PYROTECHNIC ACTUATOR;

MICROACTUATORS;

EID: 0344146574     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00319-7     Document Type: Article

References (8)

1. Bao M., Wang W. Electrostatic forces and their effects on capacitive mechanical sensors. Sensors and Actuators A. 56:1996;203-210.
2. Bao M., Wang W. Future of microelectromechanical systems (MEMS). Sensors and Actuators A. 56:1996;135-141.
3. R. Yeh, E. Kruglick, K. Pister, Microelectromechanical components for articulated microrobots, Proceeding of the Transducers'95 and Eurosensors IX, June 25-29, Sweden.
4. H. Toshiyoshi, H. Fujita, An electrostatically operated torsion mirror for optical switching device, Proceeding of the Transducers'95 and Eurosensors IX, June 25-29, Sweden.
5. R. Zengerle, A. Richter, H. Sandmaier, A micromembrane pump with electrostatic actuation, Micro Electro Mechanical Systems'92, February 4-7 1992, Germany.
6. x membrane for microheater applications. Sensors and Actuators A. 64(3):1997;241-246.
7. C. Rossi, P. Temple, D. Esteve, G. Delannoy, Realization, characterization of micropyrotechnic actuator and FEM modelling of the combustion ignition. To appear in Sensor and Actuator A, 69 (3), Nov 98.
8. Juerger Mueller, Thruster options for micro space craft: A review and evaluation of Existing Hardware and Emerging Technologies 3rd AIAA/ASME/SAE/ASEE Joint Propulsion Conference. July 6-9, 1997, Seattle, WA.