An X-ray diffraction study of epitaxial TiN/NbN superlattices

Thin Solid Films

Volumn 302, Issue 1-2, 1997, Pages 147-154

  Madan, A ^a   Yashar, P ^a   Shinn, M ^a,b   Barnett, S A ^a  

^a Northwestern University   (United States)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Nitrides; Superlattices; X ray diffraction

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; EPITAXIAL GROWTH; FORTRAN (PROGRAMMING LANGUAGE); HARDNESS; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); NIOBIUM COMPOUNDS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

GAUSSIAN WIDTH; NIOBIUM NITRIDE;

METALLIC SUPERLATTICES;

EID: 0031163413     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00023-0     Document Type: Article

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